Strain-Engineered MOSFETs

Strain-Engineered MOSFETs

作者:Maiti, C.K.
ISBN:9781138075603, 9781466500556
语言:English
出版社:CRC Press
格式:Pdf
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Keywords

Engineering; Electrical Engineering

Abstract

This book brings together new developments in the area of strain-engineered MOSFETs using high-mibility substrates such as SIGe, strained-Si, germanium-on-insulator and III-V semiconductors into a single text which will cover the materials aspects, principles, and design of advanced devices, their fabrication and applications. The book presents a full TCAD methodology for strain-engineering in Si CMOS technology involving data flow from process simulation to systematic process variability simulation and generation of SPICE process compact models for manufacturing for yield optimization.

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作者:Maiti, C.K.
ISBN:9781138075603, 9781466500556
语言:English
出版社:CRC Press
格式:Pdf
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